infiTOF

Outline

High-Reso. And compact Time of Flight MS

- Model -
infiTOF-UHV : infiTOF for gas analysis
infiTOF-Pro : infiTOF for gas analysis (Process Specification)）

Catalog(PDF)

Spec

Resolution: >30,000 (FWHM)
Mass Range: m/z 1～ 1000
Mass Accuracy: <3ppm (Internal reference method), <5ppm(External reference method)
Sensitivity: S/N>100 (1pg OFN)
Dynamic range: 10bit
Sampling rate: 2GS/s
Ion source: EI(Pos)
Dimensions (mm): W234 x H456 x D640
Weight:42kg

Related Application

Long-term monitoring for trace gases by using infiTOF
In situ monitoring of Ga(CH₃)₃ reaction with HCl on nitride semiconductor Metal-Organic Vapor Phase Epitaxy (MOVPE) by using “infiTOF-Pro”