infiTOF

Resolution: >30,000 (FWHM)
Mass Range: m/z 1～ 1000
Mass Accuracy: <3ppm (Internal reference method), <5ppm(External reference method)
Sensitivity: S/N>100 (1pg OFN)
Dynamic range: 10bit
Sampling rate: 2GS/s
Ion source: EI(Pos)
Dimensions (mm): W234 x H456 x D640
Weight:42kg

Long-term monitoring for trace gases by using infiTOF
In situ monitoring of Ga(CH₃)₃ reaction with HCl on nitride semiconductor Metal-Organic Vapor Phase Epitaxy (MOVPE) by using “infiTOF-Pro”