Application Note #MT-009 Added. “In situ monitoring of Ga(CH3)3 reaction with HCl on nitride semiconductor Metal-Organic Vapor Phase Epitaxy (MOVPE) by using infiTOF-Pro”
This application note shows the result of the experiment using infiTOF that we carried out in cooperation with Amano Laboratory, Nagoya University.
http://onlinelibrary.wiley.com/doi/10.1002/pssb.201600737/full
2017.04.14
Application Note #MT-004 "Long-term monitoring for trace gases by using infiTOF" was published.