Application Note #MT-009 Added.

“In situ monitoring of Ga(CH3)3 reaction with HCl on nitride semiconductor Metal-Organic Vapor Phase Epitaxy (MOVPE) by using infiTOF-Pro”

2017.07.07
Application Note #MT-009 “In situ monitoring of Ga(CH3)3 reaction with HCl on nitride semiconductor Metal-Organic Vapor Phase Epitaxy (MOVPE) by using infiTOF-Pro” is added.

This application note shows the result of the experiment using infiTOF that we carried out in cooperation with Amano Laboratory, Nagoya University.

http://msi.tokyo/en/application/